A membrane probing assembly (42) includes a support element (54) having an incompressible forward support (66) tiltably coupled to a rearward base and a membrane assembly (72) with its central region (80) interconnected to the support (54) by an elastomeric layer (98). Flexible traces form data/signal lines (76) to contact (88) on the central region (80). Each contact (88) comprises a rigid beam (90) and a bump (92) located in off-centered location on the beam (90), which bump (92) includes a contacting portion (93). After initial touchdown of these contacting portions (93), further over-travel of the pads (100) causes each beam (90) to independently tilt locally so that different portions of each beam (90) move different distances relative to the support (54) thus driving each contact into lateral scrubbing movement across the pad (100) thereby clearing away oxide buildup. The elastomeric member backed by the incompressible support ensures sufficient scrub pressure and reliable tilt recovery of each contact (88) without mechanical straining of the beam (90).
申请公布号
WO9807040(A1)
申请公布日期
1998.02.19
申请号
WO1997US08292
申请日期
1997.05.02
申请人
CASCADE MICROTECH, INC.;GLEASON, K., REED;SMITH, KENNETH, A.;BAYNE, MIKE