Achromatisches Linsensystem für Ultraviolettstrahlen mit Germaniumdioxid-Glas

摘要

An achromatic product, in particular for uses in the DUV range below 350 nm wavelength, and therefore in particular for projection exposure systems for microlithography, combines quartz glass with lenses made of germanium dioxide glass (GeO2). The production of GeO2 glass by CVD on an amorphous base plate made of the same material is disclosed.