CRYOPUMP SYSTEM, CONTROL DEVICE OF CRYOPUMP, REGENERATION METHOD OF CRYOPUMP

摘要

The present invention is to reduce the time for regenerating a cryopump. A cryopump control unit (100) includes a regeneration control unit which controls the cryopump (10) in a regeneration sequence including a discharge process for discharging condensate from the cryopump (10) which is rapidly performed until a discharge completion condition is satisfied based on pressure in the cryopump (10). The regeneration control unit includes: a first determination unit which repeatedly determines whether the discharge completion condition is satisfied or not; a second determination unit which determines the number of determination times of the discharge completion condition or duration time for the discharge process is at or above a first threshold value; and a temperature control unit which preliminary cools the cryopump (10) when the number of determination times of the discharge completion condition or duration time for the discharge process is at or above the first threshold value. The first determination unit determines, again, whether the discharge completion condition is satisfied during the preliminary cooling process.