METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE WHEREBY A LATERALLY BOUNDED SEMICONDUCTOR ZONE IS FORMED IN A SEMICONDUCTOR BODY IN A SELF-ALIGNING MANNER
摘要
申请公布号
EP0594248(A3)
申请公布日期
1998.02.18
申请号
EP19930202889
申请日期
1993.10.14
申请人
PHILIPS ELECTRONICS N.V.
发明人
DEKKER, RONALD;MAAS, HENRICUS GODEFRIDUS RAFAEL;PRUIJMBOOM, ARMAND;VAN DEN EINDEN, WILHELMUS T.A.