发明名称 Photodetector fabrication
摘要 A photodetector, particularly a CMT photodetector, is provided with an array of aerials such as dipoles (1) on the surface of a photosensitive layer (3) which enhance the electromagnetic fields (6) in the photosensitive layer due to incident photons (h* small Greek nu *). The aerials are defined by a laser beam (5) which locally decomposes a gaseous organometallic compound at the surface of the photo-sensitive layer.
申请公布号 GB2316223(A) 申请公布日期 1998.02.18
申请号 GB19850008773 申请日期 1985.04.03
申请人 THE * MARCONI COMPANY LIMITED 发明人 TERENCE FREDERICK * KNIBB
分类号 H01L21/365;H01L31/08;(IPC1-7):H01L21/44 主分类号 H01L21/365
代理机构 代理人
主权项
地址
您可能感兴趣的专利