发明名称 |
Photodetector fabrication |
摘要 |
A photodetector, particularly a CMT photodetector, is provided with an array of aerials such as dipoles (1) on the surface of a photosensitive layer (3) which enhance the electromagnetic fields (6) in the photosensitive layer due to incident photons (h* small Greek nu *). The aerials are defined by a laser beam (5) which locally decomposes a gaseous organometallic compound at the surface of the photo-sensitive layer.
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申请公布号 |
GB2316223(A) |
申请公布日期 |
1998.02.18 |
申请号 |
GB19850008773 |
申请日期 |
1985.04.03 |
申请人 |
THE * MARCONI COMPANY LIMITED |
发明人 |
TERENCE FREDERICK * KNIBB |
分类号 |
H01L21/365;H01L31/08;(IPC1-7):H01L21/44 |
主分类号 |
H01L21/365 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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