Method for preparing layered structure including oxide superconductor thin film

摘要

The invention provides a method for preparing a layered structure comprising a lower thin film (1) composed of an oxide superconductor and an upper thin film (2) composed of a material different from the oxide superconductor on a substrate. The lower thin film is deposited by a molecular beam deposition process and the upper thin film is deposited by a process having a deposition rate faster than that of the molecular beam deposition process.