Substrate processing apparatus

摘要

A substrate processing apparatus comprises a substrate transfer section (100), a plurality of modules (300,400) and a first substrate transfer robot (20) provided in the substrate transfer section (100) and capable of transferring substrates to the plurality of modules (300,400). The plurality of modules (300,400) are piled up, separately from one another, in a vertical direction. Each of the plurality of modules (300,400) are detachably mounted to the substrate transfer section (100) and includes a substrate processing chamber (56,454), an intermediate chamber (54,452), a first gate valve (66,464), a second gate valve (64,462), and a second substrate transfer robot disposed in the intermediate chamber (54,452). Preferably, the substrate processing apparatus further comprises a second intermediate chamber (52) having a substrate holder (70) therein and disposed between the intermediate chamber (54,452) and the substrate transfer section (100), and a third gate valve (62). The invention provide a substrate processing apparatus which requires a small floor space and which is capable of accomplishing a high net working rate.