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发明名称
SPUTTERING METHOD AND SPUTTERING DEVICE
摘要
申请公布号
JPH1046341(A)
申请公布日期
1998.02.17
申请号
JP19960202221
申请日期
1996.07.31
申请人
SHIBAURA ENG WORKS CO LTD
发明人
ODA YOSHIFUMI
分类号
C23C14/34;C23C14/56;(IPC1-7):C23C14/56
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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