Inspection system for cross-sectional imaging

摘要

A method and apparatus for inspecting a bonded joint between components. A cross-sectional image of the joint is analyzed by determining the location of a first characteristic of the joint, the centroid of the joint in the cross-sectional image; and then measuring a second characteristic of the joint in reference to the location of the centroid. This measurement may be used by comparing it with a predetermined specification expected for the measurement for the purpose of determining the quality of the joint. The invention is particularly advantageous for studying cross-sectional X-ray images of solder joints between electronic components and substrata upon which they are mounted and can be implemented for analyzing the images produced in cross-sectional X-ray inspection machines such as scanned beam X-ray laminography systems or digital tomosynthesis systems.