Pre-installation of pumping line for efficient fab expansion

摘要

A procedure for the installation of clean room processing tools which require rough pumping equipment located in areas outside of the clean room. Instead of simultaneously installing and testing the pumping equipment and the processing tool, the pumping equipment is installed first along with its associated support services. Foreline piping, terminating in the proximity of the processing tool vacuum port is also installed and capped off at this time. Functional testing and qualification of the rough pumping equipment is done and then the processing tool is moved into place and connected to the pumping line on the clean room floor. This independent and sequential installation procedure reduces perturbations of on-going manufacturing activity in the clean room area and also minimizes the risk of costly damage to the processing tool by faulty, un-tested, pumping equipment. In addition, since the rough pumping equipment can be procured and installed before hand, time can be saved by getting the processing tool on-line faster.