| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for surely preheating recovered fluorocarbon to an activation temp. before allowing this recovered fluorocarbon to flow to catalysts at the time of cracking the recovered fluorocarbon by the catalysts, and an operating method for preventing a preheating cell and the catalysts from being damaged by the cracking gases remaining in the preheating cell and the catalysts after operation. SOLUTION: A combustion chamber is internally provided with the preheating cell 12 and the upstream side thereof is connected switchably to a recovered fluorocarbon vessel and air vessel. The catalysts 15 are connected to the downstream side and the preheating cell 12 is connected to the air vessel to pass the air to the preheating cell 12 at the time of ending the operation. The preheating cell 12 for expelling the recovered fluorocarbon and the cracking gases thereof remaining in the preheating cell and the catalysts by the air flow is connected to the air vessel. The air is passed to the preheating cell and the recovered fluorocarbon and the cracking gases therefrom remaining in the preheating cell 12 and the catalysts 15 are expelled by this air flow. |
