发明名称 SALICYLIC ACID-BASED ARALKYL RESIN, ITS PRODUCTION, AND RESIN COMPOSITION USING THE SAME AND USEFUL FOR PHOTORESIST
摘要 PROBLEM TO BE SOLVED: To obtain an aralkyl resin containing salicylic acid residues and specific bisphenol residues in a specific ratio in the molecule, and capable of imparting high resolution and high sensitivity to photoresist resin compositions as an alkali-soluble component. SOLUTION: This salicylic acid-based aralkyl resin has a structure of formula I [X is (A) a salicylic acid residue or (B) 9,9-bis(4-hydroxyphenyl)fluorene residue; (m) is 0-100] and contains the residues A and B in an A/B molar ratio of 99/1 to 50/50 in the structure. The resin is obtained by cocondensing methyl salicylate with 9,9-bis(4-hydroxyphenyl)fluorene in the presence of a compound of formula II (R1 is OH, a 1-4C alkoxy, a halogen) as a condensing agent, distilling off the unreacted methyl salicylate and subsequently hydrolyzing the obtained resin ester with an alkali.
申请公布号 JPH1045880(A) 申请公布日期 1998.02.17
申请号 JP19960203743 申请日期 1996.08.01
申请人 MITSUI PETROCHEM IND LTD 发明人 URAGAMI TATSUNOBU;OTSUJI ATSUO;YAMAGUCHI KEISABURO;TAKUMA HIROSUKE
分类号 G03F7/023;C08G61/00;G03F7/039;H01L21/027;H05K3/00;(IPC1-7):C08G61/00 主分类号 G03F7/023
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