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发明名称
COATING METHOD OF PHOTORESIST
摘要
申请公布号
JPS5269270(A)
申请公布日期
1977.06.08
申请号
JP19750145744
申请日期
1975.12.05
申请人
MATSUSHITA ELECTRONICS CORP
发明人
KAWASAKI HIDEO;SUGUMOTO SUSUMU
分类号
H01L21/027;H01L21/302
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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