发明名称 Control system for a linear actuator including magnetic bearings for levitating a robot arm
摘要 A control system for controlling a linear actuator including magnetic bearings for levitating a robot arm and a pulse motor for linearly driving the arm in a non-contact manner is disclosed, which comprises a displacement detection unit including displacement sensors, first and second calculation units, moving amount detection unit and adding circuit. The displacement detection unit detects displacement values of the arm from a reference posture, the first calculation unit calculates guiding (y), levitation (z), roll (p), pitching (q), and yaw (r) control current values in response to the displacement values and provides guiding, levitation, roll, pitching, and yaw control current signals (+Z , +Z , +Z , +Z , +Z ). The moving amount detecting circuit detects a moving amount (X0) of the arm from a reference position in response to an operation of the pulse motor, and provides a compensation current value ( DELTA Iq'') proportional to the moving amount, and the adding circuit adds the compensation current value ( DELTA Iq'') to the pitching control current signal (+Z ). The second calculation unit, in response to the guiding, levitation, roll and yaw control current signals (+Z , +Z , +Z , +Z ) and the added pitching control current signal (+Z + DELTA Iq''), calculates drive current control values to compensate drive current flowing through the magnetic bearings.
申请公布号 US5720010(A) 申请公布日期 1998.02.17
申请号 US19960699342 申请日期 1996.08.19
申请人 EBARA CORPORATION 发明人 WATANABE, KATSUHIDE;KANEMITSU, YOICHI;MORIYAMA, SHINICHI;HIRAKI, NAOJI
分类号 B25J13/00;B25J9/18;B25J18/02;B25J19/00;F16C32/04;F16C39/06;G05B19/19;H02P25/06;(IPC1-7):G05B15/00;G05B19/00 主分类号 B25J13/00
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