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经营范围
发明名称
SUBSTRATE HANDLING METHOD
摘要
申请公布号
JPH1046339(A)
申请公布日期
1998.02.17
申请号
JP19960199174
申请日期
1996.07.29
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
NAKANO YOSHIYUKI;SHIBAZAKI HATSUHIKO
分类号
C23C14/50;(IPC1-7):C23C14/50
主分类号
C23C14/50
代理机构
代理人
主权项
地址
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