| 摘要 |
<p>PURPOSE:To efficiently detect the abnormality of a control system by deriving the relation (conversion ratio) not only with the actually measured value of gas flow but with a control output value, and deciding the control system as normal when the conversion ratio is within a prescribed range. CONSTITUTION:A conversion ratio calculating means 20 stores an input data 19, which is stored in a gas flow data storage area 16, in a conversion ratio data storage area for calculating the conversion ratio as a time sequential data. Next, based on the data stored in the conversion ratio data storage area 21, the conversion ratio of the conversion ratio is calculated by a ratio conversion ratio calculating means 22. By using the conversion ratio data obtained in such a way and a change ratio data, a normality judging means 23 decides the normality of the control system (controller and valve). Namely, the output value to control the aperture of a valve 11 and the measured value of gas flow to be changed by the aperture of the valve 11 are sampled and it is inspected whether, a ratio between the gas flow and the output value and the change ratio stay within the fixed range or not. Thus, the normality of the valve 11 can be monitored.</p> |
