VARIABLE PITCH WAFER TRANSFER HAND

摘要

PROBLEM TO BE SOLVED: To enable the change of the vertical pitch of wafers mounted on fingers in a simple structure, by contacting driven nodes of lift fingers to eccentric cams to set the cam strokes to the product of the pitch difference by the number of steps of the fingers. SOLUTION: The wafer transfer hand functions as follows. Driven nodes J1 -J4 of lift fingers F1 -F4 , except a reference finger F0 contact to eccentric camps C1 -C4 due to self weights. The vertical pitch of wafers is changed from a standard pitch P1 to a narrow pitch P2 and the wafers are transferred at once. The cam strokes e1 -e4 are set to the product of the pitch difference d to be changed by the number of steps of the fingers F1 -F4 . The cams C1 -C4 are rotated to move the finger F1 -F4 up and down to change the vertical pitch of the wafers.