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经营范围
发明名称
INSPECTION INSTRUMENT FOR STRIPE PATTERN
摘要
申请公布号
JPH1040815(A)
申请公布日期
1998.02.13
申请号
JP19960196824
申请日期
1996.07.26
申请人
NEC KANSAI LTD
发明人
YAMADA MITSURU
分类号
G01B11/02;G01M11/00;H01J9/227;H01J9/42;(IPC1-7):H01J9/42
主分类号
G01B11/02
代理机构
代理人
主权项
地址
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