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经营范围
发明名称
SURFACE INSPECTING DEVICE
摘要
申请公布号
JPH1038813(A)
申请公布日期
1998.02.13
申请号
JP19960205463
申请日期
1996.07.17
申请人
TOPCON CORP
发明人
SEKINE AKIHIKO
分类号
G01N21/88;G01N21/94;G01N21/956;H01L21/66;(IPC1-7):G01N21/88
主分类号
G01N21/88
代理机构
代理人
主权项
地址
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