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发明名称
TWO-DIMENSIONAL MOVING STAGE
摘要
申请公布号
JPH1038782(A)
申请公布日期
1998.02.13
申请号
JP19960200381
申请日期
1996.07.30
申请人
SHIMADZU CORP
发明人
MAEDA TOYOICHI
分类号
G01B5/00;G01N3/40;G01N35/04;(IPC1-7):G01N3/40
主分类号
G01B5/00
代理机构
代理人
主权项
地址
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