发明名称 ELECTRONIC PART INSPECTING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide an electronic part inspecting apparatus which is relatively simple in structure and is inexpensive wherein electronic parts can be correctly and efficiently inspected. SOLUTION: An electronic part support means 27 supports an electronic part 26, and a probe support means 39 supports a plurality of conductive probes 54. The conductive probes 54 are placed on a face with terminals of the electronic part 26 protruding, while their tips are connected with and/or disconnected from a free end of an external connection terminal 33. A probe arranging means 51 arranges tips 54c of the conductive probes 54 at the same height between both support means 27, 39. By moving the probe support means 39 along a direction of the terminal protruding, each external connection terminal 33 and each conductive probe 54 are connected and/or disconnected. Based on a change in a conduction state caused by this connection/disconnection, a fluctuation in protruding amounts of the external connection terminals 33 is sensed.
申请公布号 JPH1038973(A) 申请公布日期 1998.02.13
申请号 JP19960199377 申请日期 1996.07.29
申请人 IBIDEN CO LTD 发明人 SEKIYA MASATAKA;TAKAHASHI TSUNEHISA;TAKAHASHI KOJI
分类号 G01B7/02;G01R31/26;H01L21/66;H01L23/50;H05K13/08 主分类号 G01B7/02
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