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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH1041407(A)
申请公布日期
1998.02.13
申请号
JP19960209186
申请日期
1996.07.19
申请人
SONY CORP
发明人
TAJIMA KAZUHIRO
分类号
H01L21/28;H01L21/26;H01L21/265;H01L21/324;H01L21/336;H01L21/8238;H01L27/092;H01L29/78;(IPC1-7):H01L21/823
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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