| 摘要 |
PROBLEM TO BE SOLVED: To uniformly heat a plurality of substrates and exert a required effect to every substrate when the substrates are annealed simultaneously, by arranging thermostatic plates at both sides of optical recording medium substrates in an annealing apparatus. SOLUTION: When a conveyor 6 moves round, a substrate 8 suspended by a disk hanger 7 is transferred in a substrate transfer path 3 and heated to a predetermined temperature in a furnace 1. Thereafter, the substrate 8 is sent out of the furnace 1 and cooled. Thermostatic plates 2 are arranged in the furnace 1 in a transfer direction of the substrate at both sides of the path 3 to be parallel to both faces of the suspended substrate 8. Therefore, each substrate 8 is uniformly heated from both faces, and a residual internal stress of each substrate 8 during annealing is uniformly eliminated. Since the substrate 8 is heated by the heat of air and radiation heat transmitted from the thermostatic plates 2, the substrate can be heated to a required annealing temperature quickly and an annealing time is shortened, with an annealing effect improved. Moreover, the path 3 is secured because of the installation of the thermostatic plates 2, making it possible to anneal many substrates 8 simultaneously. |
