Quality assurance method for semiconductor manufacturing

摘要

The method involves storing as flow data the sequence of process steps and the process modules which are used for them for each production batch. After passing through the manufacturing process the end products are checked for defects and the test results are stored as an overall defect total for the batch. The density of defects for each process module is computed using an Algebraic Reconstruction Technique or ART algorithm, whereby the flow data for a production batch and the defect total represent an integral production result.