摘要 |
<p>The present invention relates to a method for connecting the different members of a composite target made of refractory deformation-resistant materials, wherein said method comprises soldering an amorphous solder alloy. The members to be soldered are heated, isothermally cured and cooled at a predetermined speed. A film of copper-nickel-phosphorus powder is preferably used as the solder alloy. This method ensures the reliable connection between the different members of a target used in the vacuum-application of a thin-film coating.</p> |