Micro heat conductivity detector for gas analysis

摘要

The detector has a connection channel in the form of a capillary tube as a measurement chamber. The flow cross-section of the connection channel (8) is widened by the measurement chamber (11) by a factor of no more than eight times, and preferably by a factor of one or two. The measurement chamber (11) is formed at least partly by a membrane (15). Outside the measurement chamber (11), the membrane (15) is coated with a thin film heat layer (16). Thin film temperature measurement layers (17,18) are arranged on the opposite heat layer free sections of the membrane (15), one after another, in the flow direction. The distance (22) between the output measurement point (20) and the thin film heat layer (16) is at most 0.1 mm. The distance (21) between the input measurement point (19) and the thin film heat layer (16) is at least eight times as much.