Kryopumpe

摘要

This invention concerns a cryopump (1) comprising pump sufaces (8, 9, 12, 13) which are held at different temperatures during operation and are located in a housing (2) with a flange (4) for connecting the pump (1) to a recipient (25). To improve its suction performance with easily condensable gases, the pump (1) is equipped with additional pump surfaces (26) for the accumulation of easily condensable gases. These additional surfaces (26) are situated outside the pump housing (2) and are connected via a cold bridge (28) to the first stage of the refrigeration head (6) of a refrigerator (5) including at least two stages.