Laser beam irradiation device for a disk-shaped substrate

摘要

The device has a table (1) on which a slide (2) can move on air bearings (3) from one side to the other. The slide has a substrate receiver (4) holding a substrate (5), serving as a master disc, by suction, and the receiver is mounted on the upper end of a spindle (6) fitted on the slide in air bearings so that it can rotate. The spindle and the receiver with it are rotated by the drive (7) and motor (8) that is fixed to lower end of spindle, along with a pulse source (9). A bridge (10) for holding laser beam objective (11) spans the channel for the slide. The slide is moved by the radial drive (12), producing pits on the spiral track by exposure to laser light.