发明名称 |
Rigid thin windows for vacuum applications |
摘要 |
A thin window that stands off atmospheric pressure is fabricated using photolithographic and wet chemical etching techniques and comprises at least two layers: an etch stop layer and a protective barrier layer. The window structure also comprises a series of support ribs running the width of the window. The windows are typically made of boron-doped silicon and silicon nitride and are useful in instruments such as electron beam guns and x-ray detectors. In an electron beam gun, the window does not impede the electrons and has demonstrated outstanding gun performance and survivability during the gun tube manufacturing process. |
申请公布号 |
AU3884997(A) |
申请公布日期 |
1998.02.10 |
申请号 |
AU19970038849 |
申请日期 |
1997.07.18 |
申请人 |
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA, |
发明人 |
GLENN A MEYER;DINO R. CIARLO;BOOTH R. MYERS;HAO-LIN CHEN;GEORGE WAKALOPULOS |
分类号 |
E03D5/10;G01T7/00;H01J5/18;H01J33/04;H01L21/302;H01L27/14 |
主分类号 |
E03D5/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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