发明名称 |
Electron multiplier for scanning electron mircroscopes |
摘要 |
In the scanning electron microscope 10, the electron beam B is emitted to the specimen 2. When the electron beam B strikes the specimen 2, the specimen 2 reflects the electron beam as reflected primary electrons and generates secondary electrons. Those electrons are detected by the electron detector 14, which in turn produces a reflection image of the specimen 2. The electron multiplier 1 is used for this scanning electron microscope 10. The electron multiplier 1 includes the electron reflection plate 7 which receives the electron beam B when the electron beam B passes by or passes through the specimen 2. Upon receipt of the electron beam B, the electron reflection plate 7 reflects the electron beam B as reflected primary electrons and generates secondary electrons. The microchannel plate 3 is formed with a multiplicity of channels 31 for multiplying the reflected primary electrons and the secondary electrons.
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申请公布号 |
US5717206(A) |
申请公布日期 |
1998.02.10 |
申请号 |
US19960731277 |
申请日期 |
1996.10.11 |
申请人 |
HAMAMATSU PHOTONICS K.K. |
发明人 |
WATANABE, HIROYUKI;SUZUKI, HIDEYUKI;IGUCHI, MASAHIKO |
分类号 |
H01J37/244;H01J37/28;H01J37/29;(IPC1-7):H01J37/244 |
主分类号 |
H01J37/244 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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