发明名称 |
LASER BEAM MACHINE AND DAM BAR WORKING METHOD |
摘要 |
<p>PROBLEM TO BE SOLVED: To change the relative position of a detecting position to a working position, to prevent a detecting light from the loss of a reflecting light quantity to execute a high precision of detection and to work at a high speed with a high precision of positioning. SOLUTION: A detecting laser beam 228 is made to pass through a wedge substrate 225 to tilt the optical path, further transfered in parallel by a parallel flat plate glass 227, made to pass through the front side focusing position P of a condensing lens 221, and irradiates the work 1 via the condensing lens. Since a reflecting light reflected with the work 1 returns through the same optical path as at the time of incidence and makes incident to a photodetector 226, the reflecting light quantity is not reduced. And the oscillation of the machining laser beam is controlled based on the detecting signal from the photodetector 226.</p> |
申请公布号 |
JPH1034366(A) |
申请公布日期 |
1998.02.10 |
申请号 |
JP19960195042 |
申请日期 |
1996.07.24 |
申请人 |
HITACHI CONSTR MACH CO LTD |
发明人 |
SHIMOMURA YOSHIAKI;MITSUYANAGI NAOKI;SHIRAI TAKASHI;NAKADA TOSHIHIKO |
分类号 |
B23K26/02;B23K26/04;B23K26/06;B23K101/38;H01L23/50;(IPC1-7):B23K26/02 |
主分类号 |
B23K26/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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