发明名称 PROCESSING LIQUID FEEDING NOZZLE FOR BASE SHEET PROCESSING APPARATUS
摘要 PROBLEM TO BE SOLVED: To prevent a processing liq. from falling in drops by making the processing liq. in a processing liq. flow path flow out approximately completely without adhering and remaining. SOLUTION: In a processing liq. feeding nozzle for a base sheet processing apparatus which has a processing liq. flow path 7a through which a developing liq. flows at the apex part 7 and jets the developing liq. on the surface of a base sheet from an outlet 7b communicated with this processing liq. flow path 7a, an ultra-water-repellent layer S is formed on at least inner face of the processing liq. flow path 7a in the apex part 7 of the processing liq. feeding nozzle. The developing liq. is jetted through the processing liq. flow path 7a and the outlet 7b and when jetting is stopped, the developing liq. in the processing liq. flow path 7a easily falls down by gravity without adhering and remaining.
申请公布号 JPH1035791(A) 申请公布日期 1998.02.10
申请号 JP19960191882 申请日期 1996.07.22
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 YOSHII HIROYUKI;SASADA SHIGERU
分类号 G03F7/16;B05C5/00;B67D7/02;G03F7/30;H01L21/027;H01L21/304;(IPC1-7):B67D5/02 主分类号 G03F7/16
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