发明名称 |
Cantilever and process for fabricating it |
摘要 |
A probe formed in a flexible portion of a cantilever is protected by a protection frame. This protection frame is separated from a support portion at a border of a groove between the protection frame and the support portion. A piezoelectric crystal layer is formed in the flexible portion, and when the flexible portion is bent by an interatomic force acting between the probe and a sample, a voltage induced between the both ends of the piezoelectric crystal layer changes.
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申请公布号 |
US5717132(A) |
申请公布日期 |
1998.02.10 |
申请号 |
US19960637389 |
申请日期 |
1996.04.25 |
申请人 |
NIKON CORPORATION |
发明人 |
WATANABE, SHUNJI;FUJIU, TAKAMITSU |
分类号 |
G01B21/30;G01B5/28;G01N23/00;G01N37/00;G01Q20/04;G01Q60/34;G01Q60/38;G01Q70/08;G01Q70/14;H01J37/28;(IPC1-7):G01B5/28 |
主分类号 |
G01B21/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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