发明名称 APPARATUS FOR FORMING SINGLE CRYSTAL SILICON CARBIDE ON NUCLEUS AND FORMATION THEREFOR
摘要 PROBLEM TO BE SOLVED: To eliminate a problem of graphitization to cause reduction in crystal qualities in a conventional apparatus for forming silicon carbide. SOLUTION: This apparatus is a device for forming SiC on a nucleus, is equipped with a first vessel 100 which forms a crucible, is composed of at least one wall (102, 110, 112) and is capable of receiving a SiC nucleus 122, a SiC powder storage container 118 for forming a SiC source and a heating means 120 capable of establishing a first temperature gradient between the SiC source and the second SiC nucleus 122. The wall (102, 110, 112) is enclosed by at least one SiC layer 116.
申请公布号 JPH1036195(A) 申请公布日期 1998.02.10
申请号 JP19970088467 申请日期 1997.04.07
申请人 COMMISS ENERG ATOM 发明人 JAUSSAUD CLAUDE;MADARD ROLAND;ANIKIN MIKHAIL;GARCON ISABELLE
分类号 C30B23/00;C30B29/36 主分类号 C30B23/00
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