VAPOR GROWTH APPARATUS,申请号JP19960190948-传众专利搜索

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发明名称	VAPOR GROWTH APPARATUS
摘要
申请公布号	JPH1036189(A)	申请公布日期	1998.02.10
申请号	JP19960190948	申请日期	1996.07.19
申请人	SONY CORP	发明人	YAMAMOTO SUNAO;ISHIKAWA HIDETO
分类号	C30B25/08;C23C16/18;C23C16/44;C23C16/455;H01L21/205;(IPC1-7):C30B25/08	主分类号	C30B25/08
代理机构		代理人
主权项
地址

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