发明名称 |
TELECENTRIC NUV-DUV IRRADIATOR FOR OUT-OF-CONTACT EXPOSURE OF LARGE SUBSTRATES |
摘要 |
A condenser lens system is provided for forming an effective circular source of NUV-DUV radiation which is the telecentric stop of the system and is characterized by a short focal length and higher marginal irradiance to compensate for marginal cosine losses. The system utilizes a long arc medium/low pressure mercury lamp which is surrounded by a large paraboloidal reflector and is mounted below the focal point of the reflector to generate a converging radiation beam directed to the condenser lens system. The system then projects the effective circular source of NUV-DUV radiation to a lens system comprising two plano convex lenses to convert the effective circular source into a collimated beam for out-of-contact printing of large substrates. The highly collimated and spatially coherent beam can be used to irradiate a telecentric objective for projection exposure on wafer steppers or flood exposure systems.
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申请公布号 |
CA2189928(A1) |
申请公布日期 |
1998.02.09 |
申请号 |
CA19962189928 |
申请日期 |
1996.11.08 |
申请人 |
ACTINIC SYSTEMS, INC. |
发明人 |
CAPRARI, FAUSTO |
分类号 |
F21V13/04;G03F7/20;(IPC1-7):G02B27/09;G21K5/00;G21K5/04;G02B27/18 |
主分类号 |
F21V13/04 |
代理机构 |
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主权项 |
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地址 |
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