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发明名称
Träger für eine Halbleiterscheibe und Verwendung des Trägers
摘要
申请公布号
DE19630932(A1)
申请公布日期
1998.02.05
申请号
DE1996130932
申请日期
1996.07.31
申请人
WACKER SILTRONIC GESELLSCHAFT FUER HALBLEITERMATERIALIEN AG, 84489 BURGHAUSEN, DE
发明人
SAUTER, BERND, DIPL.-PHYS., 84547 EMMERTING, DE;SEIFERT, DIETER, DIPL.-ING. DR., 84524 NEUOETTING, DE
分类号
H01L21/683;H01L21/205;H01L21/68;(IPC1-7):H01L21/68
主分类号
H01L21/683
代理机构
代理人
主权项
地址
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