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发明名称
A method of measuring a voltage with an electron beam apparatus
摘要
申请公布号
EP0505280(B1)
申请公布日期
1998.02.04
申请号
EP19920400745
申请日期
1992.03.19
申请人
FUJITSU LIMITED
发明人
OKUBO, KAZUO;ITO, AKIO;ANBE, TAKAYUKI;TEGURI, HIRONORI
分类号
G01R19/00;G01R31/302;G01R31/305;H01L21/66;(IPC1-7):G01R31/305;G01R31/307
主分类号
G01R19/00
代理机构
代理人
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地址
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