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发明名称
Apparatus and method relating to ion beams and gaseous plasma
摘要
申请公布号
GB9725552(D0)
申请公布日期
1998.02.04
申请号
GB19970025552
申请日期
1997.12.02
申请人
SUPERION LIMITED
发明人
分类号
主分类号
代理机构
代理人
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