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发明名称
Copper etching process
摘要
申请公布号
EP0665309(B1)
申请公布日期
1998.02.04
申请号
EP19950101277
申请日期
1995.01.30
申请人
EMIL KRECHEN INDUSTRIEVERTRETUNGEN GMBH
发明人
DECKER, GUENTER
分类号
C23F1/18;C23F1/46;H05K3/06;(IPC1-7):C23F1/18
主分类号
C23F1/18
代理机构
代理人
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地址
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