| 摘要 |
A ceramic member composed of a thin plate (7) having a plurality of fine through holes (1) and a rigid plate (9) integrally formed with the thin plate by firing is manufactured. The thin plate is supported by the rigid plate at least at both sides of a portion where the plurality of fine through holes are formed. A minimum hole size is * less than or equal to * 150~m, a thin plate thickness is * less than or equal to * 100~m and a minimum interval between adjacent holes is * less than or equal to * 150~m. A tensile strength * small Greek sigma * and an elongation factor for a green sheet for the thin plate are 10 to 200 kgf/ sq.cm and 0.5 to 25 cu.mm/kgf respectively. A difference between the presintering temperatures for the green sheets for the thin plate and the rigid plate is * less than or equal to * 50{C and an absolute value of the difference of firing shrinkage is * less than or equal to * 1.5%. The ceramic member may be used as a component of an ion current control head, high-precision electric field shutter, encoder or scale to detect or record a position by controlling the emission of a gas, liquid, fine particle solid or light. |
