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发明名称
SCANNING PROBE MICROSCOPE
摘要
申请公布号
JPH1031026(A)
申请公布日期
1998.02.03
申请号
JP19960185041
申请日期
1996.07.15
申请人
NIKON CORP
发明人
IWASAKI YUTAKA
分类号
G01B11/00;G01B21/30;G01N37/00;G01Q20/02;G01Q60/38;H01J37/28;(IPC1-7):G01N37/00
主分类号
G01B11/00
代理机构
代理人
主权项
地址
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