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发明名称
PATTERN CORRECTION
摘要
申请公布号
JPH1032205(A)
申请公布日期
1998.02.03
申请号
JP19970087893
申请日期
1997.04.07
申请人
SEIKO INSTR INC
发明人
ADACHI TATSUYA;YAMAMOTO MASAHIRO
分类号
H01L21/3205;H01L21/203;(IPC1-7):H01L21/320
主分类号
H01L21/3205
代理机构
代理人
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