| 摘要 |
PROBLEM TO BE SOLVED: To obtain a BCN based material with removed starting materials, small in impurities and having a crystal structure at high pressure phase by allowing a high pressure phase crystal structural material obtained by phase- changing the starting materials consisting of one of carbon and nitrogen or both and boron to contact with an active element plasma. SOLUTION: The starting materials are selectively removed by allowing the high pressure phase crystal structural material obtained by phase-changing the starting materials consisting boron (B), carbon (C) and nitrogen (N) or boron and carbon or nitrogen to contact with the active element plasma. As the high pressure phase crystal structural material, for example, a wurtzite type boron nitride and a BCN material having a diamond type crystal structure are exemplified. As the active plasma, a reaction gas containing halogen such as fluorine, chlorine is effectively used. |
