发明名称 Apparatus and method for measuring linear nanometric distances using evanescent radiation
摘要 An apparatus and method is disclosed for measuring the distance between a first body having a first surface separated by a medium from a second body through the use of transmitted evanescent radiation. The first body is substantially radiation transparent and has a critical angle of total internal reflection with respect to the medium and the second body has an optically disseminative opposing surface, that is, the opposing surface inherently disseminates radiation nonspecularly, and is capable of frustrating total internal reflection when brought into close proximity with the first surface. The apparatus and method provides for directing incident radiation into the first body toward the first surface at an angle exceeding the critical angle for total internal reflection in the first body so as to transmit radiation to the optically disseminative opposing surface, measuring the intensity of the transmitted radiation disseminated by the optically disseminative opposing surface, and calculating the distance between the first surface and the optically disseminative opposing surface based on the measured intensity of the disseminated transmitted radiation. Preferably, the optically disseminative opposing surface is composed of a material having a heterogeneous or otherwise spatially varying refractive index or a material that is capable of absorbing and reemitting the transmitted radiation. The method and apparatus may be used in a preferred embodiment for testing the distance between a magnetic recording head and a recording disk.
申请公布号 US5715060(A) 申请公布日期 1998.02.03
申请号 US19960613699 申请日期 1996.03.11
申请人 CARNEGIE MELLON UNIVERSITY 发明人 SIDES, PAUL J.
分类号 G01B11/14;G11B5/60;G11B17/32;G11B33/10;(IPC1-7):G01B11/14 主分类号 G01B11/14
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