发明名称 METHOD OF DETERMINATION OF FREE FLIGHT TIME OF PARTICLE AT DEVICE SIMULATION
摘要 PROBLEM TO BE SOLVED: To improve a simulation efficiency by multistep scattering rate. SOLUTION: A scattering rate Γi of the particle is set beforehand in the multiple step consisting of i-step (i is a natural number of 1∼n) to obtain a wave number ki of the particle when scattering rate is Γi (Step 1), and each time ti when each wave number shows the size ki is set as table data based on an electric field strength, vertical component, and parallel component of an initial wave number vector of particle (Step 2). For determination of the free flight time of particles, it is calculated from random number, time ti-1 , scattering rate Γi , and scattering rate Γi-1 by comparing a generated prescribed random number and a value obtained from the time ti shown in the table data and the scattering rate Γi .
申请公布号 JPH1032324(A) 申请公布日期 1998.02.03
申请号 JP19960184385 申请日期 1996.07.15
申请人 SONY CORP 发明人 IMANAGA TOSHIHARU
分类号 H01L29/00;G06F17/00;G06F17/50;G06F19/00 主分类号 H01L29/00
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