| 摘要 |
PROBLEM TO BE SOLVED: To provide a cylindrical fine adjustment apparatus by which a larger micro-displacement can be achieved in the X-direction and the Y-direction without increasing an applied voltage and without increasing the length of a piezoelectric element. SOLUTION: A fine adjustment apparatus comprises a first cylindrical piezoelectric element 11 which is provided with electrodes 13a, 13b for the X-axis and with electrodes 14a, 14b for the Y-axis regarding the X-axis 32 and the Y-axis 33 which are at right angles, a voltage is applied selectively to the electrodes, the cylindrical piezoelectric element is bent and deformed in the direction of the X-axis or the Y-axis, and a displacement is generated at the movement end (plate 25) of the piezoelectric element. The fine adjustment apparatus is constituted in such a way, that a cylindrical piezoelectric element 21 which is coupled via a rigid-body member 31 so as to be an internally and externally double structure on the same axis is installed at the end part other than the movement end of the first cylindrical piezoelectric element, that a displacement due to the first cylindrical piezoelectric element is added to a displacement due to the second cylindrical piezoelectric element, and that the displacement of the movement end is generated. |
