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发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH1030177(A)
申请公布日期
1998.02.03
申请号
JP19970060260
申请日期
1997.03.14
申请人
BALZERS & LEYBOLD DEUTSCHE HOLDING AG
发明人
SZCZYRBOWSKI JOACHIM;TESCHNER GOETZ;ZMELTY ANTON;BRUCH JUERGEN;MARQUARDT DIETMAR
分类号
C23C14/34;C23C14/00;C23F4/00;H01J37/305;H01J37/34;H01L21/203;H01L21/285;H01L21/302;(IPC1-7):C23C14/34;H01L21/306
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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