| 摘要 |
PROBLEM TO BE SOLVED: To avert the rapid cooling at the time of solidification and to obtain a silicon ribbon having a controlled thickness and a flat surface at a high pulling-out speed by specifying the constitution of an apparatus for producing the silicon ribbon. SOLUTION: This apparatus comprises a heating and melting section 1 for silicon, a rotary cooling body 3 which is composed of a heat resistant material, more preferably high-density graphite and is coated with a silicon nitride film on the front surface, a mechanism, more preferably stirring propeller device 2 which pressurizes and supplies the silicon melt 7 to the outer peripheral surface of the rotary cooling body 3 by the pressure of its jet and an enclosure wall 4 which is immersed into the silicon melt 7. The silicon melt 7 supplied to the rotary cooling body 3 is circulated in the crucible of the heating and melting section for the silicon by overflowing from the enclosure wall 4 immersed in the silicon melt 7. |
