| 摘要 |
PROBLEM TO BE SOLVED: To appropriately prevent solidification of a processing solvent on a nozzle member or the feeding of solidified lumpy matter, by the predispensation meeting the processing requirements of a substrate. SOLUTION: A coater unit 14 is composed so that a photoresist solvent may be fed from a nozzle 36 of a solvent feeder 30, to form a thin film on a substrate surface. The nozzle 36 is connected to a solvent reservoir through the intermediary of a solvent-feeding pipe 38 and a control valve 40 so as to control discharge by a coater controller 62. Further, the coater controller 62 is provided with a timing set up part for setting up the timing of predispensation so that one or a plurality of timing modes meeting the processing requirements of the substrate such as the quality, etc., of the processing solvent for the substrate W may be selected out of the timing modes. Furthermore, the control valve 40 may be controlled by the coater controller 62 for making feasible the predispensation in the selected timing mode, during the operation time of the substrate processor. |
